JPS6316687B2 - - Google Patents

Info

Publication number
JPS6316687B2
JPS6316687B2 JP20828882A JP20828882A JPS6316687B2 JP S6316687 B2 JPS6316687 B2 JP S6316687B2 JP 20828882 A JP20828882 A JP 20828882A JP 20828882 A JP20828882 A JP 20828882A JP S6316687 B2 JPS6316687 B2 JP S6316687B2
Authority
JP
Japan
Prior art keywords
light
image
height
bright
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20828882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5999216A (ja
Inventor
Toyoki Kitayama
Shigeru Morya
Kazuhiko Komatsu
Teruaki Okino
Shunichi Ide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20828882A priority Critical patent/JPS5999216A/ja
Publication of JPS5999216A publication Critical patent/JPS5999216A/ja
Publication of JPS6316687B2 publication Critical patent/JPS6316687B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP20828882A 1982-11-27 1982-11-27 物体の表面高さ測定装置 Granted JPS5999216A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20828882A JPS5999216A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20828882A JPS5999216A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Publications (2)

Publication Number Publication Date
JPS5999216A JPS5999216A (ja) 1984-06-07
JPS6316687B2 true JPS6316687B2 (en]) 1988-04-11

Family

ID=16553762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20828882A Granted JPS5999216A (ja) 1982-11-27 1982-11-27 物体の表面高さ測定装置

Country Status (1)

Country Link
JP (1) JPS5999216A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0820230B2 (ja) * 1984-06-08 1996-03-04 オリンパス光学工業株式会社 計測用内視鏡
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JP2728368B2 (ja) * 1994-09-05 1998-03-18 株式会社 日立製作所 露光方法

Also Published As

Publication number Publication date
JPS5999216A (ja) 1984-06-07

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